Author Affiliations
Abstract
Key Laboratory of Advanced Semiconductor Devices and Materials, School of Electronic Engineering, Xi’an University of Posts & Telecommunications, Xi’an 710121, China
Sn doping is an effective way to improve the response rate of Ga2O3 film based solar-blind detectors. In this paper, Sn-doped Ga2O3 films were prepared on a sapphire substrate by radio frequency magnetron sputtering. The films were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy and ultraviolet visible spectroscopy, and the effect of annealing atmosphere on the properties of films was studied. The Ga2O3 films changed from amorphous to β-Ga2O3 after annealing at 900 °C. The films were composed of micro crystalline particles with a diameter of about 5–20 nm. The β-Ga2O3 had high transmittance for wavelengths above 300 nm, and obvious absorption for solar-blind signals at 200–280 nm. The metal semiconductor metal type solar-blind detectors were prepared. The detector based on Sn-doped β-Ga2O3 thin film annealed in N2 has the best response performance to 254 nm light. The photo-current is 10 μA at 20 V, the dark-current is 5.76 pA, the photo dark current ratio is 1.7 × 106, the response rate is 12.47 A/W, the external quantum efficiency is 6.09 × 103%, the specific detection rate is 2.61 × 1012 Jones, the response time and recovery time are 378 and 90 ms, respectively.
Sn doped Ga2O3 RF magnetron sputtering solar-blind photodetector 
Journal of Semiconductors
2023, 44(6): 062805
杨言若 1,2步扬 1,*徐静浩 1王少卿 1[ ... ]李杰 3
作者单位
摘要
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学材料与光电研究中心, 北京 100049
3 中国工程物理研究院激光聚变研究中心, 四川 绵阳 621000
为实现精密光学元件表面疵病的高效测量和精确统计,提出了一种基于光谱估计和多光谱技术的光学元件表面疵病检测方法。该方法利用光谱估计提取白光图像中不同波长的单光谱疵病图像,并合成多光谱疵病图像,然后采用优化后的OTSU(Otsu Image Segmentation Algorithm)分别对单光谱与多光谱疵病图像进行分析。基于该方法搭建了光学元件表面疵病检测装置,获得了白光照明条件下光学元件表面疵病的图像。实验结果表明,与原始白光图像相比,合成多光谱图像的疵病检出数量提升了1.85倍,疵病检出面积最大增加了6.0倍,检测效率得到明显提高。根据光学元件表面疵病的特性选取不同波长组合来生成单光谱与多光谱图像,可更加高效精确地检测出传统检测技术不易检出的疵病信息。
测量 疵病检测 光谱估计 多光谱技术 疵病数量 疵病面积 
中国激光
2019, 46(9): 0904002
Author Affiliations
Abstract
1 Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai 201800, China
2 University of Chinese Academy of Science, Beijing 100049, China
3 School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
4 College of Science, Shanghai University, Shanghai 201800, China
Face recognition technology has great prospects for practical applications. Three-dimensional (3D) human faces are becoming more and more important in consideration of the limits of two-dimensional face recognition. We propose an active binocular setup to obtain a 3D colorful human face using the band-limited binary patterns (BBLP) method. Two grayscale cameras capture the BBLP projected onto the target of human face by a digital light processing (DLP) projector synchronously. Then, a color camera captures a colorful image of the human face. The benefit of this system is that the 3D colorful human face can be obtained easily with an improved temporal correlation algorithm and the precalibration results between three cameras. The experimental results demonstrated the robustness, easy operation, and the high speed of this 3D imaging setup.
110.6880 Three-dimensional image acquisition 150.6910 Three-dimensional sensing 330.1400 Vision - binocular and stereopsis 330.1720 Color vision 
Chinese Optics Letters
2016, 14(8): 081101
Author Affiliations
Abstract
Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, University of Chinese Academy of Sciences, Shanghai 201800, China
For manufacturing a fine optical glass lens, it is important to obtain a 3D profile of a semi-finished product with a rough surface. We develop an active binocular 3D scanning setup to measure the 3D profile of a rough surface optical element. Two cameras simultaneously capture the band-pass binary random patterns which are projected on the target object. The highlight of this system is using the temporal correlation technique to determine the stereo correspondence between the pixels of the two cameras. The 3D point cloud can be reconstructed by the triangulation principle. Experiment results confirmed that this method effectively measures the rough surface of an optical element with sufficient accuracy.
110.6880 Three-dimensional image acquisition 120.2830 Height measurements 150.6910 Three-dimensional sensing 330.1400 Vision - binocular and stereopsis 
Chinese Optics Letters
2015, 13(8): 081101
作者单位
摘要
中国科学院上海光学精密机械研究所信息光电实验室, 上海 201800
点云配准是光学三维(3D)轮廓测量术的关键技术之一。无标志点的点云配准大多由迭代最近点(ICP)算法实现。为提高ICP 算法的性能,提出了一种基于点云单应性的迭代最近点配准算法。描述了该算法中单应性点对的建立方法,并推导了点云之间的坐标变换。用一种手持式三维轮廓扫描仪对一个同时具备高频轮廓和低频轮廓的石膏像进行扫描,共得到92帧点云。利用改进ICP算法,82帧点云被成功配准。同时也利用三种具有代表性的ICP算法对这92 帧点云进行配准实验以作比较。实验表明,该算法具有稳健性强、收敛速度快、收敛精度高的优点,有助于三维模型的快速重建。
机器视觉 迭代最近点 点云配准 三维扫描 
光学学报
2015, 35(5): 0515003
作者单位
摘要
1 鲁东大学物理与光电工程学院, 山东 烟台 264025
2 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
基于衍射的角谱理论分析了二维振幅型六角周期阵列物体的塔尔博特效应。将六角型点阵结构看成两个长方型点阵结构的叠加,推导出了六角型周期阵列物体的塔尔博特距离公式,并进一步分析了分数塔尔博特距离处的塔尔博特像,给出了分数塔尔博特距离处的复振幅分布公式。通过理论数值模拟与实验研究发现,在分数塔尔博特距离处的衍射图样还是周期性的六角型阵列,只是阵列周期发生了变化。研究结果表明,当分数塔尔博特距离的分数值β为3的正整数倍时,周期减小为原来的3/β;当分数塔尔博特距离的分数值β为非3的正整数倍时,周期减小为原来的1/β。
衍射 塔尔博特效应 角谱理论 六角型点阵 
光学学报
2013, 33(s2): s205002
Author Affiliations
Abstract
A simple modal analysis (MA) method to explain the diffraction process of 0th order nulled phase mask is presented. In MA, multiple reflections of the grating modes at grating interfaces are considered by introducing equivalent Fresnel coefficients. Analytical expressions of the diffraction efficiencies and modal guidelines for the 0th order nulled phase grating design are also presented. The phase mask structure, which comprises a high-index contrast HfO2 grating and a fused-silica substrate, is optimized using rigorous coupled-wave analysis around the 800-nm wavelength, after which the modal guideline for cancellation of the 0th order in a phase mask is verified. The proposed MA method illustrates the inherent physical mechanism of multiple reflections of the grating modes in the diffraction process, which can help to analyze and design both low-contrast and high-contrast gratings.
050.1950 Diffraction gratings 050.1960 Diffraction theory 050.6624 Subwavelength structures 
Chinese Optics Letters
2013, 11(7): 070502
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, China
The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.
微悬臂梁 简谐振动 相位重构 自混合干涉 120.0120 Instrumentation, measurement, and metrology 220.4840 Testing 230.5750 Resonators 
Chinese Optics Letters
2010, 8(2): 177
作者单位
摘要
1 中国科学院上海光学精密机械研究所信息光学实验室, 上海 201800
2 中国科学院研究生院, 北京 100039
利用渐进稳定性分析的方法研究了小注入电流条件下反馈光注入半导体激光器的复合腔模(ECM)的稳定性, 并提出对应于所有的复合腔模在相空间内存在一个模式稳定区域, 复合腔模出现在该模式稳定区域内的概率远大于出现在该模式稳定区域外。通过求解复合腔模的鞍结分岔及霍普夫分岔边界条件并计算载流子浓度的庞加莱截图, 验证了模式稳定区域的存在。数值计算的半导体激光器载流子浓度的分岔图验证了在小注入电流条件下渐进分析的可靠性。
激光器 半导体激光器 反馈光注入 复合腔模 稳定区域 分岔 
中国激光
2009, 36(6): 1360

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